NPI
LCD, semiconductor industry, and equipment using vacuum plasma cause leakage and defects when plasma is abnormal, The NPI system is a device that detects faults in the event of leakage and plasma abnormalities and monitors the condition and stability in the chamber.
❖ EPD(End Point Detection) to save cleaning gas
❖ Diagnose Chamber Cleaning Performance at all chambers
❖ Specific optical design to detect extremely low intensity signal
❖ Saving full range spectrum
❖ Able to set full spectrum range
❖ Minimum sampling time to detection plasma (< 200 msec)
❖ Able to handle up to max 8 chambers at same time
❖ Fully controlled by remote system (Main system)
❖ Multiple setting for multiple steps in deposition recipe
❖ New Algorithm to check plasma status real time based
❖ All data files and signals are able to connect with main server