NPI
LCD, SEMICONDUCTOR INDUSTRY, AND EQUIPMENT USING VACUUM PLASMA CAUSE LEAKAGE AND DEFECTS WHEN PLASMA IS ABNORMAL, THE NPI SYSTEM IS A DEVICE THAT DETECTS FAULTS IN THE EVENT OF LEAKAGE AND PLASMA ABNORMALITIES AND MONITORS THE CONDITION AND STABILITY IN THE CHAMBER.
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EPD(End Point Detection) to save cleaning gas
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Diagnose Chamber Cleaning Performance at all chambers
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Specific optical design to detect extremely low intensity signal
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Saving full range spectrum
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Able to set full spectrum range
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Minimum sampling time to detection plasma (< 200 msec)
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Able to handle up to max 8 chambers at same time
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Fully controlled by remote system (Main system)
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Multiple setting for multiple steps in deposition recipe
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New Algorithm to check plasma status real time based
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All data files and signals are able to connect with main server