❖ Analysis real time based Plasma Status

❖ Detection abnormal plasma situation

    - Glass breakage

    - Arc, Plasma Blinking or Oscillation

    - Unstable gas flow, Chamber pressure

    - RF power hunting

    - Chamber leak

❖ Saving full spectrum data for new process development

❖ Able to cover multi chambers (up to 8 chambers)

❖ AI engine based review function