PLM

REAL-TIME, PLASMA CHAMBER MONITORING SYSTEM THAT MAINLY DETECTS VACUUM LEAKAGE AND ABNORMAL PLASMA SIGNAL.

PLM Product
❖ Analysis real time based Plasma Status
❖ Detection abnormal plasma situation
  • - Glass breakage
  • - Arc, Plasma Blinking or Oscillation
  • - Unstable gas flow, Chamber pressure
  • - RF power hunting
  • - Chamber leak
❖ Saving full spectrum data for new process development
❖ Able to cover multi chambers (up to 8 chambers)
❖ AI engine based review function