❖ Real time based Inspection the shadowing and under-coating

❖ No need other additional chamber to integrate inspection system

❖ SIS check the mask edge status

❖ SIS diagnoses the Arc and distortion of edge knife

❖ SIS diagnoses film edge shape and film stack status

❖ SIS is able to check glass and mask alignment status

❖ SIS analyzes each mask life time and sagging performance