DEVELOPMENT OF GLASS INSPECTION SYSTEM PRODUCT THAT ENABLES HIGH-SPEED AND PRECISE INSPECTION OF 8TH GENERATION LARGE-AREA GLASS SUBSTRATES
REAL-TIME, PLASMA CHAMBER MONITORING SYSTEM THAT MAINLY DETECTS VACUUM LEAKAGE AND ABNORMAL PLASMA SIGNAL.
THE NPI SYSTEM IS A DEVICE THAT DETECTS FAULTS IN THE EVENT OF LEAKAGE AND PLASMA ABNORMALITIES AND MONITORS THE CONDITION AND STABILITY IN THE CHAMBER.
SHADOW INSPECTION SYSTEM
