❖ Check Glass/wafer status - Crack, scratch, spot/stain or breakage on glass

❖ Analyze the film profile at Corner area

    - Able to check Susceptor/Electrode Flatness

    - Able to check Arc generation

    - Able to check the Assembling Status of glass/wafer fixture(S/F)

    - Able to check Ground Strap Breakage at corner area

    - Able to check Golf-T head Broken at corner and edge area

❖ Check glass/wafer Fixture Sitting status

❖ Analysis of the Vacuum robot and ATM Robot Performance(Accuracy and reliability)

❖ Check the clamping function performance in L/L

❖ Check the Glass Sliding or Dislocation of Glass in Load Lock chamber

❖ Check the glass/wafer status after clamping function in L/L