GIS

DEVELOPMENT OF GLASS INSPECTION SYSTEM PRODUCT THAT ENABLES HIGH-SPEED AND PRECISE INSPECTION OF 8TH GENERATION LARGE-AREA GLASS SUBSTRATES

GIS Product
❖ Check Glass/wafer status - Crack, scratch, spot/stain or breakage on glass
❖ Analyze the film profile at Corner area
  • - Able to check Susceptor/Electrode Flatness
  • - Able to check Arc generation
  • - Able to check the Assembling Status of glass/wafer fixture(S/F)
  • - Able to check Ground Strap Breakage at corner area
  • - Able to check Golf-T head Broken at corner and edge area
❖ Check glass/wafer Fixture Sitting status
❖ Analysis of the Vacuum robot and ATM Robot Performance(Accuracy and reliability)
❖ Check the clamping function performance in L/L
❖ Check the Glass Sliding or Dislocation of Glass in Load Lock chamber
❖ Check the glass/wafer status after clamping function in L/L